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C00345 - SEMI C3.45 - Standard for Hexafluoroethane (C2F6), 99.996% Quality (Provisional) StdTpc-Glass Wafer with additional requirements to meet

SKU: 16924025754

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Description

with additional requirements to meet the needs of the semiconductor industry

or non-contact methods (e

Some inspection equipment may generate

SEMI E37-0298 (technical revision)

SEMI C47-0706 (complete rewrite)

C00345 - SEMI C3.45 - Standard for Hexafluoroethane (C2F6), 99.996% Quality (Provisional) StdTpc-Glass Wafer with additional requirements to meetThis Standard was technically approved by the Gases Global Technical Committee. Available at www. semi. org in July 2001; originally published in 1992. NOTICE: This Document was balloted and approved for withdrawal in 2001. Hexafluoroethane is one of the most stable of all organic compounds. It is inert, colorless, nonflammable, odorless and tasteless. Referenced SEMI Standards None.

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